Electrically isolated thermally carbonized porous silicon layer for humidity sensing purposes

Sensors and Actuators, B: Chemical

Volumn 131, Issue 2, 2008, Pages 627-632

  Tuura, Jaani ^a   Björkqvist, Mikko ^a   Salonen, Jarno ^a   Lehto, Vesa Pekka ^a  

^a UNIVERSITY OF TURKU   (Finland)

Author keywords

Chemical oxidation; Electrical isolation; Electrochemical oxidation; Humidity sensing; Porous silicon; Thermal carbonization

Indexed keywords

CARBONIZATION; ELECTROCHEMICAL OXIDATION; POROUS SILICON; THERMAL EFFECTS;

ELECTRICAL ISOLATION; LIQUID OXIDATIONS; THERMAL CARBONIZATION; THERMALLY CARBONIZED MATERIALS;

HUMIDITY SENSORS;

EID: 42949100410     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.12.062     Document Type: Article

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