SCOPUS 정보 검색 플랫폼

Volumn 80, Issue 1-4, 1998, Pages 147-152

Comparative study of the oxidation of thin porous silicon layers studied by reflectometry, spectroscopic ellipsometry and secondary ion mass spectroscopy

(5) Fried, M a Polgar O a Lohner, T a Strehlke, S b Levy Clement, C b

a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE (Hungary)

b CNRS (France)

Author keywords

Ellipsometry; Porous silicon; Reflectometry; SIMS

Indexed keywords

EID: 0004975924 PISSN: 00222313 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-2313(98)00086-6 Document Type: Article

Times cited : (16)

References (7)

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2
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- (1994) Mater. Res. Soc. Symp. Proc. , vol.342 , pp. 91
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3
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- (1996) Thin Solid Films , vol.276 , pp. 223
- Fried, M.¹ Lohner, T.² Polgár, O.³ Petrik, P.⁴ Vázsonyi, É.⁵ Bársony, I.⁶ Piel, J.P.⁷ Stehle, J.L.⁸

4
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- A. Krotkus, K. Grigoras, V. Pacebutas, I. Bársony, E. Vázsonyi, M. Fried, J. Szlufcik, J. Nijs, C. Levy-Clement, Sol. Energy Mat. Sol. Cells 45 (1997) 267.
- (1997) Sol. Energy Mat. Sol. Cells , vol.45 , pp. 267
- Krotkus, A.¹ Grigoras, K.² Pacebutas, V.³ Bársony, I.⁴ Vázsonyi, E.⁵ Fried, M.⁶ Szlufcik, J.⁷ Nijs, J.⁸ Levy-Clement, C.⁹

5
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- M. Fried, T. Lohner, W.A.M. Aarnink, L.J. Hanekamp, A. van Silfhout, J. Appl. Phys. 71 (1992) 2835.
- (1992) J. Appl. Phys. , vol.71 , pp. 2835
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- (1998) Thin Solid Films , vol.313-314 , pp. 150
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7
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- S. Strehlke, D. Sarti, O. Polgár, M. Fried, C. Lévy-Clément, J. Electrochem. Soc. 97-20 (1997) 278.
- (1997) J. Electrochem. Soc. , vol.97 , Issue.20 , pp. 278
- Strehlke, S.¹ Sarti, D.² Polgár, O.³ Fried, M.⁴ Lévy-Clément, C.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.