Long-term stability of thermally-carbonized porous silicon humidity sensor

Materials Research Society Symposium Proceedings

Volumn 876, Issue , 2005, Pages 138-143

  Tuura, J ^a   Bjorkqvist M ^a   Salonen, J ^a   Lehto, V P ^a  

^a UNIVERSITY OF TURKU   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CARBONIZATION; HYSTERESIS; POROUS SILICON; SENSITIVITY ANALYSIS; STABILITY;

DETECTION FREQUENCY; ELECTRICAL CHARACTERISTICS; LONG-TERM STABILITY;

HUMIDITY SENSORS;

EID: 34250012840     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-876-r8.8     Document Type: Conference Paper

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