Hafnium silicide formation on Si(001)

Physical Review B - Condensed Matter and Materials Physics

Volumn 69, Issue 23, 2004, Pages

  Johnson Steigelman, H T ^a   Brinck, A V ^a   Parihar, S S ^a   Lyman, P F ^a  

^a UNIVERSITY OF WISCONSIN MILWAUKEE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMICAL REACTION; ELECTRON DIFFRACTION; FILM; MORPHOLOGY; OXIDATION; SCANNING ELECTRON MICROSCOPY; SOLID STATE; TEMPERATURE DEPENDENCE; THICKNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 42749103716     PISSN: 01631829     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevB.69.235322     Document Type: Article

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