Nanovoid formation in helium-implanted single-crystal silicon studied by in situ techniques

Physical Review B - Condensed Matter and Materials Physics

Volumn 69, Issue 16, 2004, Pages

  Frabboni, S ^a   Corni, F ^a   Nobili, C ^a   Tonini, R ^a   Ottaviani, G ^a  

^a UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

HELIUM; SILICON;

ARTICLE; CRYSTAL; DESORPTION; PRESSURE; SPECTROMETRY; TEMPERATURE; TRANSMISSION ELECTRON MICROSCOPY;

EID: 42749099716     PISSN: 01631829     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevB.69.165209     Document Type: Article

References (12)

1. C.C. Griffionen, J.H. Evans, P.C. de Jong, and A. Van Veen, Nucl. Instrum. Methods Phys. Res. B 27, 417 (1987).
2. D.J. Eaglesham, A.E. White, L.C. Feldman, N. Moriya, and D.C. Jacobson, Phys. Rev. Lett. 70, 1643 (1993).
3. S.M. Myers, D.M. Follstaedt, H.J. Stain, and W.R. Wampler, Phys. Rev. B 47, 13380 (1993).
4. V. Raineri, P.G. Fallica, G. Percolla, A. Battaglia, M. Barbagallo, and S.U. Campisano, J. Appl. Phys. 78, 3727 (1995).
5. G.F. Cerofolini, F. Corni, S. Frabboni, C. Nobili, G. Ottaviani, and R. Tonini, Mater. Sci. Eng., R. 27, 1 (2000).
6. J.H. Evans, Nucl. Instrum. Methods Phys. Res. B 196, 125 (2002).
7. P.F.P. Fichtner, J.R. Kaschny, R.A. Yankov, A. Mücklich, U. Kreißig, and W. Skorupa, Appl. Phys. Lett. 70, 732 (1997).
8. P.F.P. Fichtner, J.R. Kaschny, M. Behar, R.A. Yankov, A. Mücklich, and W. Skorupa, Nucl. Instrum. Methods Phys. Res. B 148, 329 (1999).
9. F. Corni, G. Calzolari, F. Gambetta, C. Nobili, R. Tonini, and M. Zapparoli, Mater. Sci. Eng., B 71, 207 (2000).
10. L. Reimer, Transmission Electron Microscopy, Springer Series in Optical Sciences, 2nd ed. (Springer, Berlin, 1989).
11. G.F. Cerofolini, G. Calzolari, F. Corni, S. Frabboni, C. Nobili, G. Ottaviani, and R. Tonini, Phys. Rev. B 61, 10 183 (2000).
12. J. Chen, P. Jung, and H. Trinkaus, Phys. Rev. Lett. 82, 2709 (1999).