Electronic structure characterization of ultra low-k carbon doped oxide using soft X-ray emission spectroscopy

Thin Solid Films

Volumn 516, Issue 15, 2008, Pages 4851-4854

  Reid, I ^a,b   Zhang, Y ^a   DeMasi, A ^a   Hughes, G ^b   Smith, K E ^a  

^a USA   (United States)

^b DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

CDO; SXE; ULK; XAS

Indexed keywords

BAND STRUCTURE; CHEMICAL BONDS; ELECTRONIC STRUCTURE; EXCITATION ENERGY; PERMITTIVITY; RADIATION DAMAGE; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON DOPED OXIDE (CDO); HYBRIDIZATION; LOW ENERGY SUBBANDS; PARTIAL DENSITY;

OXIDE FILMS;

EID: 42649141222     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.09.020     Document Type: Article

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