Surface characterization of TiO2 thin films obtained by high-energy reactive magnetron sputtering

Applied Surface Science

Volumn 254, Issue 14, 2008, Pages 4396-4400

  Wasielewski, R ^a   Domaradzki, J ^b   Wojcieszak, D ^b   Kaczmarek, D ^b   Borkowska, A ^b   Prociow, E L ^b   Ciszewski, A ^a  

^a UNIVERSITY OF WROC AW   (Poland)

^b WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Hot target; Pseudoepitaxy; Reactive sputtering; Rutile; Titanium dioxide

Indexed keywords

ATOMIC FORCE MICROSCOPY; MAGNETRON SPUTTERING; THIN FILMS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

NANOCRYSTALLINE STRUCTURE; PSEUDOEPITAXIAL GROWTH; STOICHIOMETRIC COMPOSITION;

TITANIUM DIOXIDE;

EID: 42649114439     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.01.017     Document Type: Article

References (22)

1. D.J. Won C.H. Wang H.K. Jang D.J. Choi Appl. Phys. A 73 2001 595
2. T. Ivanova A. Harizanova Solid State Ionics 138 2001 227
3. J. Musil Vacuum 50 1998 363
4. D. Mercs F. Perry A. Billard Surf. Coat. Technol. 201 2006 2276
5. K. Zakrzewska A. Brudnik M. Radecka W. Posadowski Thin Solid Films 343–344 1999 152
6. P. Jin M. Tazawa K. Yoshimura K. Igarashi S. Tanemura K. Macak U. Helmersson Thin Solid Films 375 2000 128
7. C.-K. Jung S.B. Lee J.-H. Boo S.-J. Ku K.-S. Yu J.-W. Lee Surf. Coat. Technol. 174–175 2003 296
8. J. Domaradzki D. Kaczmarek E.L. Prociow A. Borkowska D. Schmeisser G. Beuckert Thin Solid Films 513 2006 269
9. E.L. Prociow, J. Domaradzki, D. Kaczmarek, T. Berlicki, Polish patent No. PL 382163 (2007).
10. K. Okimura Surf. Coat. Technol. 135 2001 286
11. Y.S. Jung D.W. Lee D.Y. Jeon Appl. Surf. Sci. 221 2004 136
12. H. Klug L. Alexander X-ray Diffraction Procedures 1974 Wiley New York
13. I. Horcas R. Fernandez J.M. Gomez-Rodriguez J. Colchero J. Gomez-Herrero A.M. Baro Rev. Sci. Instrum. 78 2007 013705
14. D. Schmeisser P. Hoffman G. Beuckert E. Zschech C. Whelan T. Mikolajick Materials for Information Technology, Devices, Interconnects and Packaging. Series: Engineering Materials and Processes 2005 Springer
15. OriginPro7.5 SR1, OriginLab Corporation, Northhampton, MA 01060, U.S.A.
16. Powder Diffraction File, Joint Committee on Powder Diffraction Standards 1967 ASTM Philadelphia, PA PDF Card 21-1276
17. Powder Diffraction File, Joint Committee on Powder Diffraction Standards 1967 ASTM Philadelphia, PA PDF Card 21-1272
18. V.V. Atuchin V.G. Kesler N.V. Pervukhina Z.J. Zhang J. Electron Spectrosc. Relat. Phenom. 152 2006 18
19. B. Liu X. Zhao Q. Zhao X. He J.J. Feng J. Electron. Spectrosc. Relat. Phenom. 148 2005 158
20. H. Perron J. Vandenborre C. Domain R. Drot J. Roques E. Simoni J.-J. Ehrhardt H. Catalette Surf. Sci. 601 2007 518
21. P.M. Kumar S. Badrinarayanan M. Sastry Thin Solid Films 358 2000 122
22. Q.G. Zeng Z.J. Ding Z.M. Zhang J. Lumin. 118 2006 301