Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications

Nanotechnology

Volumn 19, Issue 12, 2008, Pages

  Luber, E ^a,b   Mohammadi, R ^a,b   Ophus, C ^a,b   Lee, Z ^c   Nelson Fitzpatrick, N ^a,b   Westra, K ^a   Evoy, S ^a,b   Dahmen, U ^c   Radmilovic, V ^c   Mitlin, D ^a,b  

^a UNIVERSITY OF ALBERTA   (Canada)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; MICROSTRUCTURE; NEMS; POLYCRYSTALLINE MATERIALS; SURFACE MORPHOLOGY;

METAL THIN FILMS; METALLIC STRUCTURAL COMPONENTS; POLYCRYSTALLINE MONO-METALLIC FILMS;

THIN FILMS;

ALLOY; METAL; MOLYBDENUM; NANOPARTICLE; NICKEL; SILICON;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMICAL STRUCTURE; CRYSTAL; ELECTRIC CONDUCTIVITY; ELECTRIC RESISTANCE; FILM; HARDNESS; NANOELECTROMECHANICAL SYSTEM; OPTICAL ROTATION; PRIORITY JOURNAL; STRESS; SURFACE PROPERTY; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

EID: 42549167067     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/12/125705     Document Type: Article

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