Steering-enhanced roughening during metal deposition at grazing incidence

Physical Review Letters

Volumn 82, Issue 20, 1999, Pages 4038-4041

  Van Dijken, Sebastiaan ^a   Jorritsma, Louis C ^a,b   Poelsema, Bene ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b ASML   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000406849     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.82.4038     Document Type: Article

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