Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation

Journal of Microelectromechanical Systems

Volumn 14, Issue 1, 2005, Pages 113-124

  Tong, Hien Duy ^a   Gielens, F C ^b   Gardeniers, J G E ^a   Jansen, Henri V ^a   Berenschot, J W ^a   de Boer, Meint J ^a   de Boer, J H ^a   van Rijn, Cees J M ^c   Elwenspoek, Miko C ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c AQUAMARIJN MICRO FILTRATION B V   (Netherlands)

Author keywords

Hydrogen separation; Membrane module; Membrane reactor; Microfabrication technology; Pd Ag membrane; SiN microsieves; 110 wafers

Indexed keywords

DEHYDROGENATION; FABRICATION; HELIUM; HYDROGEN; MEMBRANES; PALLADIUM ALLOYS; PRESSURE EFFECTS; PURIFICATION; STRENGTH OF MATERIALS;

HYDROGEN SEPARATION; MEMBRANE MODULE; MEMBRANE REACTOR; MICROFABRICATION TECHNOLOGY; MICROSIEVES; PALLADIUM SILVER MEMBRANE;

MICROELECTROMECHANICAL DEVICES;

EID: 14144251350     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839005     Document Type: Article

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