A high performance microfluidic system integrated with the micropump and microvalve on the same substrate

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1684-1687

  Yoo, Jong Chul ^a   Moon, Min Chul ^a   Choi, Y J ^a   Kang, C J ^a   Kim, Yong Sang ^a  

^a Myong Ji University   (South Korea)

Author keywords

ITO; Microfluidic system; Micropump; Microvalve; PDMS

Indexed keywords

CHEMICAL ANALYSIS; ELECTRIC POWER MEASUREMENT; INDIUM ALLOYS; INTEGRATED OPTICS; MICROOPTICS; OPTICAL PUMPING;

ITO; MICROFLUIDIC SYSTEM; MICROPUMP; MICROVALVE; PDMS;

FLUIDICS;

EID: 33646056417     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.202     Document Type: Article

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