Design and fabrication of a high sensitivity focal plane array for uncooled IR imaging

Journal of Micromechanics and Microengineering

Volumn 18, Issue 5, 2008, Pages

  Yu, Xiaomei ^a   Yi, Yuliang ^a   Ma, Shenglin ^a   Liu, Ming ^b   Liu, Xiaohua ^b   Dong, Liquan ^b   Zhao, Yuejin ^b  

^a PEKING UNIVERSITY   (China)

^b BEIJING INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

GOLD; IMAGING SYSTEMS; INFRARED IMAGING; OPTICAL SYSTEMS; SENSITIVITY ANALYSIS;

REFLECTION LAYERS; THERMOMECHANICAL SENSITIVITY; THICK GOLD BIMATERIAL LAYERS;

FOCAL PLANE ARRAYS;

EID: 42549084708     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/5/057001     Document Type: Article

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