IR imaging using a cantilever-based focal plane array fabricated by deep reactive ion etching technique

Applied Physics Letters

Volumn 91, Issue 5, 2007, Pages

  Wang, Xin ^a   Ma, Shenglin ^a   Yu, Xiaomei ^a   Liu, Ming ^b   Liu, Xiaohua ^b   Zhao, Yuejin ^b  

^a PEKING UNIVERSITY   (China)

^b BEIJING INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

INFRARED IMAGING; REACTIVE ION ETCHING; SUBSTRATES;

CANTILEVERS; NOISE EQUIVALENT TEMPERATURE DIFFERENCE (NETD); SACRIFICIAL LAYER TECHNIQUES;

FOCAL PLANE ARRAYS;

EID: 34547664812     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2768024     Document Type: Article

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