Effect of bias application on c-BN synthesis by induction thermal plasmas under atmospheric pressure

Thin Solid Films

Volumn 516, Issue 13, 2008, Pages 4462-4467

  Watanabe, Takayuki ^a   Sataka, Ryoichi ^a   Yamamoto, Kenji ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b KOBE STEEL LTD   (Japan)

Author keywords

Cubic boron nitride; DC bias application; Induction plasma; Thermal plasma

Indexed keywords

CUBIC BORON NITRIDE; INDUCTION HEATING; PLASMA SOURCES; SYNTHESIS (CHEMICAL); THERMAL EFFECTS;

DC BIAS APPLICATIONS; INDUCTION PLASMAS; THERMAL PLASMA;

BIAS CURRENTS;

EID: 41549128393     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.10.018     Document Type: Article

References (28)

1. Matsumoto S., and Zhang W. Jpn. J. App. Phys. Part 2 39 (2000) L442
2. Matsumoto S., and Zhang W. Diamond Relat. Mater. 10 (2001) 1868
3. Zhang W., and Matsumoto J. Mater. Res. 15 (2000) 2677
4. Yu J., and Matsumoto S. Diamond Relat. Mater. 13 (2004) 1704
5. Yu J., Matsumoto S., and Okada K. Appl. Phys. A 80 (2005) 777
6. Matsumoto S., and Zhang W. Jpn. J. App. Phys. Part 2 40 (2001) L570
7. Matsumoto S., Nishida N., Akashi K., and Sugai K. J. Mater. Sci. 31 (1996) 713
8. Yu J., and Matsumoto S. Diamond Relat. Mater. 12 (2003) 1903
9. Kalss W., Haubner R., and Lux B. Diamond Relat. Mater. 7 (1998) 369
10. Konyashin I., Loeffler J., Bill J., and Aldinger F. Thin Solid Films 308-309 (1997) 101
11. Konyashin I., Aldinger F., Babaev V., Khvostov V., Guseva M., Bregadze A., Baumgartner K.-M., and Rauchle E. Thin Solid Films 355-356 (1999) 96
12. Zhang J., Cui Q., Li X., He Z., Li W., Ma Y., Guan Q., Gao W., and Zou G. Chem. Phys. Lett. 399 (2004) 451
13. Reinke S., Kuhr M., and Kulisch W. Diamond Relat. Mater. 3 (1994) 341
14. Reinke S., Kuhr M., and Kulisch W. Surf. Coat. Technol. 74-75 (1995) 723
15. Reinke S., Kuhr M., Kulisch W., and Kassing R. Diamond Relat. Mater. 4 (1995) 272
16. Robertson J. Diamond Relat. Mater. 5 (1996) 519
17. Hofsass H., Feldermann H., Sebastian M., and Ronning C. Phys. Rev. B 55 (1997) 13230
18. Weissmantel C., Bewilogua K., Dietrich D., Erler H.J., Hinneberg H.J., Klose S., Nowick W., and Reisse G. Thin Solid Films 72 (1980) 19
19. Weissmantel C. Thin Solid Films 92 (1982) 55
20. McKenzie D.R., Cockayne D.J.H., and Muller D.A. J. Appl. Phys. 70 (1991) 3007
21. Mckenzie D.R., McFall W.D., Stainty W.G., Davis C.A., and Collins R.E. Diamond Relat. Mater. 2 (1993) 970
22. Mirkarimi P.B., McCarty K.F., Medlin D.L., Wolfer W.G., Friedmann T.A., Klaus E.J., Cardinale G.F., and Howitt D.G. J. Mater. Res., 9 (1994) 2925
23. Lifshitz Y., Kasi S.R., and Rabalais J.W. Phys. Rev. Lett. 62 (1989) 1290
24. Lifshitz Y., Kasi S.R., and Rabalais J.W. Phys. Rev. B 41 (1990) 10468
25. Davis C.A. Thin Solid Films 226 (1993) 30
26. Robertson J. Diamond Relat. Mater. 2 (1993) 984
27. Dworschak W., Jung K., and Ehrhardt H. Thin Solid Films 254 (1995) 65
28. Bartl A., Bohr S., Haubner R., and Lux B. Int. J. Refract. Metals Mater. 14 (1996) 145