Field emission at nanometer distances for high-resolution positioning

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 2, 2008, Pages 724-729

  Le Fbre A J ^a   Abelmann, L ^a   Lodder, J C ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; SILICON; TITANIUM COMPOUNDS;

HIGH RESOLUTION POSITIONING; NANOMETER DISTANCES;

FIELD EMISSION;

EID: 41549114567     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2894898     Document Type: Article

References (19)

1. R. C. Smith, J. D. Carey, R. D. Forrest, and S. R. P. Silva, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1880072 23, 632 (2005).
2. R. Young, J. Ward, and F. Scire, Rev. Sci. Instrum. 0034-6748 10.1063/1.1685846 43, 999 (1972).
3. A. J. le F̀bre, R. Luttge, L. Abelmann, and J. C. Lodder, J. Phys.: Conf. Ser. 1742-6588 61, 673 (2007).
4. A. Knoll, P. Bächtold, J. Bonan, G. Cherubini, M. Despont, U. Drechsler, U. Dürig, B. Gotsmann, W. Häberle, C. Hagleitner, Microlectron. Eng. 0167-9317 83, 1692 (2006).
5. R. G. Forbes, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.590588 17, 526 (1999).
6. E. L. Murphy and R. H. Good, Phys. Rev. 0031-899X 10.1103/PhysRev.102. 1464 102, 1464 (1956).
7. R. G. Forbes, C. J. Edgcombe, and U. Valdre, Ultramicroscopy 0304-3991 10.1016/S0304-3991(02)00297-8 95, 57 (2003).
8. J. M. Bonard, M. Croci, I. Arfaoui, O. Noury, D. Sarangi, and A. Châtelain, Diamond Relat. Mater. 0925-9635 10.1016/S0925-9635(01)00541-6 11, 763 (2002).
9. H. Kosmahl, IEEE Trans. Electron Devices 0018-9383 10.1109/16.81650 38, 1534 (1991).
10. H. Craig Miller, J. Appl. Phys. 0021-8979 10.1063/1.1709157 38, 4501 (1967).
11. F. Hecht, O. Pironneau, and A. le Hyaric, FreeFem++, a finite element PDE solver (software version 2.14 from http://www.freefem.org, March 2007).
12. M. W. Denhoff, J. Phys. D 39, 1761 (2006). 0022-3727
13. A. J. le F̀bre, M. Siekman, L. Abelmann, and J. C. Lodder, Transducers 2007 Solid-State Actuators and Microsystems Conference, 2007 (unpublished), p. 2361.
14. W. Martienssen and H. Warlimont, Handbook of Condensed Matter and Materials Data (Springer, New York, 2005).
15. R. G. Forbes, J. H. B. Deane, N. Hamid, and H. San Sim, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1691410 22, 1222 (2004).
16. F. M. Charbonnier and E. E. Martin, J. Appl. Phys. 0021-8979 10.1063/1.1728859 33, 1897 (1962).
17. P. G. Van Patten, J. D. Noll, M. L. Myrick, C. R. Li, and T. S. Sudarshan, J. Phys. Chem. 100, 3646 (1996). 0022-3654
18. M. A. McCord, D. P. Kern, and T. H. P. Chang, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.584192 6, 1877 (1988).
19. D. A. Alman, D. N. Ruzic, and J. N. Brooks, Phys. Plasmas 1070-664X 10.1063/1.873960 7, 1421 (2000).