Displacement sensing by field emission with nanometer resolution

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2361-2364

  Le Febre A J ^a   Siekman, M ^a   Abelmann, L ^a   Lodder, J C ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Displacement sensing; Field emission; Probe recording; Sensor

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; FIELD EMISSION; MICROSCOPIC EXAMINATION; MICROSYSTEMS; SCANNING PROBE MICROSCOPY; SENSORS; TRANSDUCERS;

CONSTANT CURRENT; DISPLACEMENT SENSING; ELECTRODE GAPS; EXPERIMENTAL DATA; EXPONENTIAL RELATION; FIELD EMISSION CURRENTS; FIELD EMISSION SOURCES; FIELD EMISSIONS; FOWLER-NORDHEIM EQUATIONS; INTERNATIONAL CONFERENCES; LINEAR REGIME; NANOMETER RESOLUTIONS; NM RESOLUTION; PROBE RECORDING; PROBE TIPS; SENSOR; SENSOR PERFORMANCES; SOLID-STATE SENSORS;

IMAGING TECHNIQUES;

EID: 50049103872     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300644     Document Type: Conference Paper

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