Characterization of hydrogenated nanocrystalline silicon thin films prepared with various negative direct current biases

Journal of Materials Research

Volumn 23, Issue 3, 2008, Pages 790-797

  Shim, Jae Hyun ^a   Cho, Nam Hee ^a   Lee, El Hang ^a   Lee, Han Sup ^a  

^a Inha University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGENATION; NANOCRYSTALLITES; OPTICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON; SUBSTRATES; THIN FILMS;

AMORPHOUS MATRIX; HYDROGENATED NANOCRYSTALLINE SILICON; SILICON THIN FILMS;

NANOCRYSTALLINE SILICON;

EID: 41449083317     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2008.0092     Document Type: Article

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