The effect of DC bias voltage on the structural and optical properties of hydrogenated nanocrystalline Si thin films

Solid State Phenomena

Volumn 124-126, Issue PART 2, 2007, Pages 1261-1264

  Shim, Jae Hyun ^a   Cho, Nam Hee ^a  

^a Inha University   (South Korea)

Author keywords

DC bias; nc Si; PECVD; PL

Indexed keywords

HYDROGENATION; NANOCRYSTALLINE MATERIALS; NANOCRYSTALLITES; OPTICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS;

NANOSTRUCTURAL VARIATION; PL EMISSION WAVELENGTH;

SILICON COMPOUNDS;

EID: 38549174855     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/3-908451-31-0.1261     Document Type: Conference Paper

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