Strained silicon: Engineered substrates and device integration

2004 International Conference on Integrated Circuit Design and Technology, ICICDT

Volumn , Issue , 2004, Pages 261-268

  Currie, Matthew T ^a  

^a AmberWave Systems Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HOLE MOBILITY; LIGHT SCATTERING; MOSFET DEVICES; SEMICONDUCTOR JUNCTIONS; SILICON ON INSULATOR TECHNOLOGY; SUBSTRATES; TENSILE STRENGTH; TRANSISTORS;

DEVICE INTEGRATION; MATERIAL QUALITY; STRAINED SILICON; VALENCE BAND;

SEMICONDUCTING SILICON;

EID: 4143051395     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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