Characterising the potential of MEMS deformable mirrors for astronomical adaptive optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6272 II, Issue , 2006, Pages

  Morzinski, Katie M ^a,b   Evans, Julia W ^a,c,d   Severson, Scott ^a,b   Macintosh, Bruce ^a,b,c   Dillon, Daren ^a,b   Gavel, Don ^a,b   Max, Claire ^a,b   Palmer, Dave ^a,c  

^a NATIONAL SCIENCE FOUNDATION   (United States)

^b University of California Santa Cruz   (United States)

^c LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^d UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Adaptive optics; Characterization; Deformable mirrors; Extreme adaptive optics; MEMS

Indexed keywords

ACTUATORS; MICROELECTROMECHANICAL DEVICES; MIRRORS; NATURAL FREQUENCIES; OPTICAL PHASE CONJUGATION;

DEFORMABLE MIRRORS; EXTREME ADAPTIVE OPTICS; INVERSE SPATIAL FREQUENCY; OPEN-LOOP CORRECTION;

ADAPTIVE OPTICS;

EID: 33749381840     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.672470     Document Type: Conference Paper

References (10)

1. B. Macintosh, J. Graham, B. Oppenheimer, L. Poyneer, A. Sivaramakrishnan, and J.-P. Veran, "MEMS-based extreme adaptive optics for planet detection," in MEMS/MOEMS Components and their Applications III, S. S. Olivier, S. A. Tadigadapa, and A. K. Henning, eds., Proc. SPIE 6113, pp. 48-57, 2006.
2. E. Kibblewhite, M. F. Smutko, and F. Shi, "The effect of hysteresis on the performance of deformable mirrors and methods of its compensation," in Adaptive Optics in Astronomy, M. A. Ealey and F. Merkle, eds., Proc. SPIE 2201, pp. 754-761, 1994.
3. -7 contrast measurements," Optics Letters 31, pp. 565-567, 2006.
4. G. E. Sommargren, D. W. Phillion, M. A. Johnson, N. Q. Nguyen, A. Barty, F. J. Snell, D. R. Dillon, and L. S. Bradsher, "100-picometer interferometry for EUVL," in Emerging Lithographic Technologies VI, R. L. Engelstad, ed., Proc. SPIE 4688, pp. 316-328, 2002.
5. J. W. Evans, B. Macintosh, L. Poyneer, K. Morzinski, S. Severson, D. Dillon, D. Gavel, and L. Reza, "Demonstrating sub-nm closed loop MEMS flattening," Optics Express, under review, 2006.
6. T. Bifano, P. Bierden, and J. Perreault, "Micromachined deformable mirrors for dynamic wavefront control," in Advanced Wavefront Control: Methods, Devices and Applications II, J. D. Gonglewski, M. T. Gruineisen, and M. K. Giles, eds., Proc. SPIE 5553, pp. 1-16, 2004.
7. J. W. Evans, K. Morzinski, S. Severson, L. Poyneer, B. Macintosh, D. Dillon, L. Reza, D. Gavel, D. Palmer, S. Olivier, and P. Bierden, "Extreme adaptive optics testbed: Performance and characterization of a 1024-MEMS deformable mirror," in MEMS/MOEMS Components and their applications III, S. Olivier, ed., Proc. SPIE 6113, pp. 131-136, 2006.
8. C. R. Vogel and Q. Yang, "Modeling, simulation, and open-loop control of a continuous facesheet MEMS deformable mirror," JOSA A 23, pp. 1074-1081, 2006.
9. H. R. Shea, A. Gasparyan, C. D. White, and R. B. Comizzoli, "Anodic oxidation and reliability of MEMS poly-silicon electrodes at high relative humidity and high voltages," in MEMS Reliability for Critical Applications, R. A. Lawton, ed., Proc. SPIE 4180, pp. 117-122, 2000.
10. J. W. Evans, K. Morzinski, L. Reza, S. Severson, L. Poyneer, B. Macintosh, D. Dillon, G. Sommargren, D. Palmer, D. Gavel, and S. Olivier, "Extreme adaptive optics testbed: High contrast measurements with a MEMS deformable mirror," in Techniques and Instrumentation for Detection of Exoplanets II, D. R. Coulter, ed., Proc. SPIE 5905, pp. 303-310, 2005.