Modeling, simulation, and open-loop control of a continuous facesheet MEMS deformable mirror

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 23, Issue 5, 2006, Pages 1074-1081

  Vogel, Curtis R ^a   Yang, Qiang ^a  

^a MONTANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGEBRA; COMPUTER SIMULATION; ELECTROSTATIC ACTUATORS; MATHEMATICAL MODELS; OPTIMIZATION; PARTIAL DIFFERENTIAL EQUATIONS;

DEFORMABLE MIRROR; MICRO-ELECTROMECHANICAL SYSTEMS (MEMS); OPEN-LOOP CONTROL;

MIRRORS;

EID: 33745276303     PISSN: 10847529     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAA.23.001074     Document Type: Article

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