An experimental study on the fabrication of glass-based acceleration sensor body using micro powder blasting method

Sensors

Volumn 7, Issue 5, 2007, Pages 697-707

  Park, Dong Sam ^a   Yun, Dae Jin ^a   Cho, Myeong Woo ^b   Shin, Bong Cheol ^b  

^a SolarLight Ltd   (South Korea)

^b Inha University   (South Korea)

Author keywords

Acceleration sensor; Micro powder blasting; Micromachining, masking, etching

Indexed keywords

BLASTING; COMPOSITE MICROMECHANICS; FABRICATION; MICROMACHINING;

ACCELERATION SENSORS; BLASTING CONDITIONS; BLASTING PRESSURE; DIMENSIONAL ERRORS; MASS FLOW RATE; MICROPOWDERS; SENSOR STRUCTURES; SODA LIME GLASS;

GLASS;

EID: 34249881941     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s7050697     Document Type: Article

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