Effects of deposition parameters on the electrical and mechanical properties of indium tin oxide films on polyethylene napthalate substrates deposited by radio frequency magnetron sputtering

Thin Solid Films

Volumn 516, Issue 12, 2008, Pages 4064-4069

  Bhagat, S K ^a   Han, H ^a   Zoo, Y ^a   Lewis, J ^b   Grego, S ^b   Lee, K ^c   Iyer, S ^c   Alford, T L ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

^b RTI INTERNATIONAL   (United States)

^c NORTH CAROLINA A AND T STATE UNIVERSITY   (United States)

Author keywords

Flexible substrates; Indium tin oxide; Mechanical properties; Polyethylene napthalate; Resistivity

Indexed keywords

DEPOSITION; ELECTRIC CONDUCTIVITY; GAS MIXTURES; MAGNETRON SPUTTERING; POLYETHYLENES; POLYMER FILMS; RADIO FREQUENCY IDENTIFICATION (RFID);

FLEXIBLE SUBSTRATES; INDIUM TIN OXIDE; POLYETHYLENE NAPTHALATE; RESISTIVITY;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 40849111528     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.12.146     Document Type: Article

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