Growth of c-axis orientation ZnO films on polymer substrates by radio-frequency magnetron sputtering

Optical Materials

Volumn 30, Issue 8, 2008, Pages 1244-1250

  Chen, Kaixin ^a   Chiang, Kin Seng ^a   Chan, Hau Ping ^a   Chu, Pak Lim ^b  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b Hong Kong Science and Technology Park ^*  (Hong Kong)

Author keywords

Optical waveguide; Polymer substrate; Sputtering; Thin films; Zinc oxide

Indexed keywords

FILM GROWTH; MAGNETRON SPUTTERING; OPTICAL WAVEGUIDES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

POLYMER SUBSTRATE; RADIO-FREQUENCY MAGNETRON SPUTTERING;

ZINC OXIDE;

EID: 40849086246     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optmat.2007.06.003     Document Type: Article

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