-
1
-
-
0036902776
-
Piezoresistive accelerometers for MCM package
-
Plaza, J.; Collado, A.; Cabruja, E.; Esteve, J. Piezoresistive accelerometers for MCM package. J. Microelectromech. Syst. 2002, 11(6), 794-801.
-
(2002)
J. Microelectromech. Syst
, vol.11
, Issue.6
, pp. 794-801
-
-
Plaza, J.1
Collado, A.2
Cabruja, E.3
Esteve, J.4
-
3
-
-
0343341658
-
Laterally driven accelerometer fabricated in single crystalline silicon
-
Biefeld, V.; Buhrdorf, A.; Binder, J. Laterally driven accelerometer fabricated in single crystalline silicon. Sens. Actuators A: Phys. 2000, 82(1), 149-154.
-
(2000)
Sens. Actuators A: Phys
, vol.82
, Issue.1
, pp. 149-154
-
-
Biefeld, V.1
Buhrdorf, A.2
Binder, J.3
-
4
-
-
0032138896
-
Micromachined inertial sensors
-
Yazdi, N.; Ayazi, F.; Najafi, K. Micromachined inertial sensors. Proc. IEEE 1998 56(8), 1640-1659.
-
(1998)
Proc. IEEE
, vol.56
, Issue.8
, pp. 1640-1659
-
-
Yazdi, N.1
Ayazi, F.2
Najafi, K.3
-
5
-
-
0035438954
-
A high-precision, wide-bandwidth micromachined tunneling accelerometer
-
Liu, C.; Kenny, T.W. A high-precision, wide-bandwidth micromachined tunneling accelerometer. J Microelectromech. Syst. 2001, 10(3), 425-433.
-
(2001)
J Microelectromech. Syst
, vol.10
, Issue.3
, pp. 425-433
-
-
Liu, C.1
Kenny, T.W.2
-
6
-
-
0033332864
-
Micromachined accelerometer based on electron tunneling
-
Li, L.; Xu, Y.; Zhao, Y.; Liang, C.; Wei, T.; Yang, Y. Micromachined accelerometer based on electron tunneling. Proc. SPI-Int. Soc. Opt. Eng. 1999, 3891, 121-125.
-
(1999)
Proc. SPI-Int. Soc. Opt. Eng
, vol.3891
, pp. 121-125
-
-
Li, L.1
Xu, Y.2
Zhao, Y.3
Liang, C.4
Wei, T.5
Yang, Y.6
-
7
-
-
0036903903
-
A vacuum packaged surface micromachined resonant accelerometer
-
Seshia, A.; Palaniapan, M.; Roessig, T.; Howe, R.; Gooch, R.; Schimert, T.; Montague, S. A vacuum packaged surface micromachined resonant accelerometer. J. Microelectromech. Syst. 2002, 11(6), 784-793.
-
(2002)
J. Microelectromech. Syst
, vol.11
, Issue.6
, pp. 784-793
-
-
Seshia, A.1
Palaniapan, M.2
Roessig, T.3
Howe, R.4
Gooch, R.5
Schimert, T.6
Montague, S.7
-
8
-
-
33750395408
-
Comparison of integrated micro-electrical-mechanical system and piezoelectric accelerometers for machine condition monitoring
-
Thanagasundram, S.; Schlindwein, F. Comparison of integrated micro-electrical-mechanical system and piezoelectric accelerometers for machine condition monitoring. Proc. of IMechE. 2006, 220.
-
(2006)
Proc. of IMechE
, vol.220
-
-
Thanagasundram, S.1
Schlindwein, F.2
-
9
-
-
84876636148
-
-
Shuster, M.; Briano, B.; Kitchin, C Mounting considerations for ADXL series accelerometers. AN-379. In Analog devices application notes; 2002.
-
Shuster, M.; Briano, B.; Kitchin, C Mounting considerations for ADXL series accelerometers. AN-379. In Analog devices application notes; 2002.
-
-
-
-
10
-
-
0029344533
-
Vibration of dry pumps
-
Sabin, E. Vibration of dry pumps. Semicond. Int. 1995, 18(8), 249-250.
-
(1995)
Semicond. Int
, vol.18
, Issue.8
, pp. 249-250
-
-
Sabin, E.1
-
11
-
-
20444457600
-
On Standardisation of Accelerometers
-
Sinha, J. On Standardisation of Accelerometers. Journal of Sound and Vibration 2005, 286, 417-427.
-
(2005)
Journal of Sound and Vibration
, vol.286
, pp. 417-427
-
-
Sinha, J.1
-
13
-
-
33750383390
-
ADXL105: A lower-noise, wider-bandwidth accelerometer rivals performance of more expensive sensors
-
Doscher, J. ADXL105: a lower-noise, wider-bandwidth accelerometer rivals performance of more expensive sensors. Analogue Dialogue 1999, 33(6), 27-29.
-
(1999)
Analogue Dialogue
, vol.33
, Issue.6
, pp. 27-29
-
-
Doscher, J.1
-
14
-
-
0033278728
-
Using iMEMs accelerometers in instrumentation applications
-
Instrument Society of America
-
Doscher, J. Using iMEMs accelerometers in instrumentation applications. In Proceedings of the 45th International Instrumentation Symposium, Instrument Society of America, 1999; pp. 395-404.
-
(1999)
Proceedings of the 45th International Instrumentation Symposium
, pp. 395-404
-
-
Doscher, J.1
-
15
-
-
0031141385
-
Monitoring machine vibration with micromachined accelerometers
-
Doscher, J. Monitoring machine vibration with micromachined accelerometers. Sensors 1997, 14(5), 33-38.
-
(1997)
Sensors
, vol.14
, Issue.5
, pp. 33-38
-
-
Doscher, J.1
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