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Volumn , Issue , 1999, Pages 395-404
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Using iMEMS accelerometers in instrumentation applications
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ACCELEROMETERS;
ETCHING;
LITHOGRAPHY;
MICROMACHINING;
PIEZOELECTRIC DEVICES;
SURFACE MICROMACHINING;
MICROELECTROMECHANICAL DEVICES;
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EID: 0033278728
PISSN: 02277576
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (3)
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References (0)
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