A 400 μm thickness diamond-like carbon preparation

Diamond and Related Materials

Volumn 17, Issue 3, 2008, Pages 405-408

  Oka, Y ^a   Yatsuzuka, M ^a   Nishijima, M ^b   Hiraga, K ^b  

^a UNIVERSITY OF HYOGO   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Adhesion; DLC; PBIID; Residual stress; Supra thick DLC

Indexed keywords

ACETYLENE; ALUMINUM ALLOYS; DEPOSITION; FILM THICKNESS; ION IMPLANTATION; METHANE; RESIDUAL STRESSES; STRESS RELAXATION; THICK FILMS;

AMORPHOUS-LIKE STRUCTURE; CARBON ION IMPLANTATION;

DIAMOND LIKE CARBON FILMS;

EID: 40749120465     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2008.01.056     Document Type: Article

References (18)

1. Conrad J.A., Radtke J.L., Dodd R.A., Worzala F.J., and Tran N.C. J. Appl. Phys. 62 (1987) 4591
2. Walter K.C., Nastasi M., and Munson C. Surf. Coat. Technol. 93 (1997) 287
3. Yatsuzuka M., Oka Y., and Nishimura Y. Proc. 5th Inter'l. Symp. Pulsed Power and Plasma Applications vol. 97 (2004)
4. Kirinuki M., Tomita A., Kusuda M., Oka Y., Murakami A., and Yatsuzuka M. Mater. Sci. Forum 502 (2005) 315
5. Tomita A., Kusuda M., Otsuki S., Oka Y., Nishimura Y., Murakami A., and Yatsuzuka M. Thin Solid Films 506 (2006) 59
6. McKenzie D.R., Muller D., and Pailthorpe B.A. Phys. Rev. Lett. 67 (1991) 773
7. Fallon P.J., Veerasamy V.S., Davis C.A., Robertson J., Amaratunga G.A.J., Milne W.I., and Koskinen J. Phys. Rev., B 48 (1993) 4777
8. Anttila A., Lappalainen R., Tiainen V., and Hakovirta M. Adv. Mater. 9 (1997) 1161
9. Bilek M.M.M., McKenzie D.R., Tarrant R.N., Lim S.H.M., and McCloch D.G. Surf. Coat. Technol. 156 (2002) 136
10. Bilek M.M.M., Tarrant R.N., McKenzie D.R., Lim S.H.N., and McClloch D.G. IEEE Trans. Plasma Sci. 31 (2003) 939
11. Oka Y., Tao M., Nishimura Y., Azuma K., and Yatsuzuka M. Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 206 (2003) 700
12. Oka Y., Kirinuki M., Nishimura Y., Azuma K., Fujiwara E., and Yatsuzuka M. Surf. Coat, Technol. 186 (2004) 141
13. Nishimura Y., Oka Y., Azuma K., Fujiwara E., and Yatsuzuka M. J. High Temp. Soc. 29 (2003) 196 [in Japanese]
14. Onoi M., Fujiwara E., Oka Y., Nishimura Y., Azuma K., and Yatsuzuka M. Surf. Coat. Technol. 186 (2004) 200
15. Oka Y., Nishijima M., Hiraga K., and Yatsuzuka M. Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 257 (2007) 702
16. Oka Y., Nishijima M., Hiraga K., and Yatsuzuka M. IEEE Trans. Plasma Sci. 34 (2006) 1183
17. Robertson J., and Manning M.I. Mater. Sci. Technol. 6 (1990) 81
18. Ferrari A.C., and Robertson J. Phys. Rev., B 61 (2000) 14095