Theoretical analysis of surface stress for a microcantilever with varying widths

Journal of Physics D: Applied Physics

Volumn 41, Issue 6, 2008, Pages

  Li, Xian Fang ^a   Peng, Xu Long ^a  

^a CENTRAL SOUTH UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFERENTIAL EQUATIONS; STRESS ANALYSIS; SURFACE PROPERTIES;

MICROCANTILEVERS; MICROMECHANICAL SENSORS; SURFACE STRESS; THEORETICAL ANALYSIS;

MATHEMATICAL MODELS;

EID: 40549142764     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/6/065301     Document Type: Article

References (37)

1. Ibach H 1997 Surf. Sci. Rep. 29 193
2. Haiss W 2001 Rep. Prog. Phys. 64 591
3. Muller P and Saul A 2004 Surf. Sci. Rep. 54 157
4. Sander D 2003 Curr. Opin. Solid State Mater. Sci. 7 51
5. Berger R, Delamarche E, Lang H P, Gerber Ch, Gimzewski J K, Meyer E and Guntherodt H-J 1997 Science 276 2021
6. Fritz J, Baller M K, Lang H P, Strunz H T, Meyer E, Guntherodt H J, Gerber Ch and Gimzewski J K 2000 Science 288 316
7. Barnes J R, Stephenson R J, Welland M E, Gerber Ch and Glmzewskl J K 1994 Nature 372 79
8. Stuckless J T, Al-Sarraf N, Wartnaby C and King D A 1993 J. Chem. Phys. 99 2202
9. Kramer G, Viswanath R N and Weissmuller J 2004 Nano Lett. 4 793
10. Tabard-Cossa V, Godin M, Beaulieu L Y and Grutter P 2005 Sensors Actuators B 107 233
11. Moulin A M, O'Shea S J and Welland M E 2000 Ultramicroscopy 82 23
12. Stoney G 1909 Proc. R. Soc. Lond A 82 172
13. Jaccodine R J and Schlegal W A 1966 J. Appl. Phys. 37 2429
14. Finot M, Blech I A, Suresh S and Fujimoto H 1997 J. Appl. Phys. 81 3457
15. Godin M, Tabard-Cossa V, Grutter P and Williams P 2001 Appl. Phys. Lett. 79 551
16. McFarland A E, Poggi M A, Doyle M J, Bottomley L A and Colton J S 2005 Appl. Phys. Lett. 87 053505
17. Payne J A, McCormick A V and Francis L F 1997 Rev. Sci. Instrum. 68 4564
18. Francis L F, McCormick A V, Vaessen D M and Payne J A 2002 J. Mater. Sci. 37 4717
19. Blech I A, Blech I and Finot M 2005 J. Appl. Phys. 97 113525
20. Evans D R and Craig V S J 2006 J. Phys. Chem. 110 19507
21. von Preissig F J 1989 J. Appl. Phys. 66 4262
22. Klein C A 2000 J. Appl. Phys. 88 5487
23. Sader J E 2001 J. Appl. Phys. 89 2911
24. Hsueh C-H 2002 J. Appl. Phys. 91 9652
25. Freund L B, Floro J A and Chason E 1999 Appl. Phys. Lett. 74 1987
26. Zhang Y, Ren Q and Zhao Y P 2004 J. Phys. D: Appl. Phys. 37 2140
27. Tsai S H and Kan H C 2007 J. Phys. D: Appl. Phys. 40 6129
28. Neumelster J M and Ducker W A 1994 Rev. Sci. Instrum. 65 2527
29. Sader J E 2002 J. Appl. Phys. 91 9354
30. Warmack R J, Zheng X-Y, Thundat T and Allison D P 1994 Rev. Sci. Instrum. 65 394
31. Miyatani T and Fujihira M 1997 J. Appl. Phys. 81 7099
32. Muller M, Schimmel T, Haubler P, Fettig H, Muller O and Abbers A 2006 Surf. Interface Anal. 38 1090
33. Timoshenko S P and Gere J M 1961 Theory of Elasticity Stability (New York: McGraw-Hill)
34. Li X-F 2007 Math. Comput. Simul. 75 113
35. Liu F, Rugheimer P, Mateeva E, Savage D E and Lagally M G 2002 Nature 416 498
36. Jeon S and Thundat T 2004 Appl. Phys. Lett. 85 1083
37. Sander D, Linke U and Ibach H 1992 Surf. Sci. 272 318