Transport phenomena in an atmospheric-pressure townsend discharge fed by N2/N2O/HMDSO mixtures

Plasma Processes and Polymers

Volumn 4, Issue 9, 2007, Pages 806-814

  Enache, Ionut ^a   Caquineau, Hubert ^a   Gherardi, Nicolas ^a   Paulmier, Thierry ^a   Maechler, Louison ^a   Massines, Francoise ^a  

^a Laboratoire Plasma et Conversion d'Energie   (France)

Author keywords

Atmospheric pressure glow discharges (APGD); Dielectric barrier discharges (DBD); Hexamethyldisiloxane (HMDSO); Modeling; Thin film deposition

Indexed keywords

ATMOSPHERIC PRESSURE; DISSOCIATION; FILM GROWTH; SILICA; SURFACE REACTIONS;

ATMOSPHERIC PRESSURE GLOW DISCHARGES; DIELECTRIC BARRIER DISCHARGES; THIN-FILM DEPOSITION;

GLOW DISCHARGES;

EID: 36349012417     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200700073     Document Type: Article

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