Kinematically stabilized microbubble actuator arrays

Journal of Microelectromechanical Systems

Volumn 17, Issue 1, 2008, Pages 124-132

  Wu, Xiaosong ^a   Yuan, Guang ^b   Yoon, Yong Kyu ^c   Allen, Mark G ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c State University of New York   (United States)

Author keywords

Digital Clay; Endoskeletal bubble; Inclined exposure; Microbubble actuator

Indexed keywords

KINEMATICS; LITHOGRAPHY; MICROFABRICATION; MICROFLUIDICS; NUMERICAL ANALYSIS;

DIGITAL CLAY; ENDOSKELETAL BUBBLE; MICROBUBBLE ACTUATOR;

MICROACTUATORS;

EID: 40449093024     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.911868     Document Type: Article

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