Development of a micro-bellows actuator using micro-stereolithography technology

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1201-1204

  Kang, Hyun Wook ^a   Lee, In Hwan ^b   Cho, Dong Woo ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b Chungbuk National University   (South Korea)

Author keywords

Bellows; Micro actuator; Micro gripper; Micro stereolithography technology

Indexed keywords

BELLOWS; BIOTECHNOLOGY; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; MOTION ESTIMATION; PRODUCT DEVELOPMENT; THREE DIMENSIONAL COMPUTER GRAPHICS;

MICRO-ACTUATORS; MICRO-GRIPPERS; MICRO-STEREOLITHOGRAPHY (MSTL) TECHNOLOGY; MICRO-STEREOLITHOGRAPHY TECHNOLOGY;

ACTUATORS;

EID: 33748268341     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.228     Document Type: Article

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