Improved manufacturability and characterization of a corrugated Parylene diaphragm pressure transducer

Journal of Micromechanics and Microengineering

Volumn 16, Issue 8, 2006, Pages 1468-1474

  Luharuka, Rajesh ^a   Noh, Hongseok ^a,c   Kim, Sang Kyung ^a   Mao, Hua ^b   Wong, Lid ^b   Hesketh, Peter J ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b BioTechPlex Corporation   (United States)

^c Drexel University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CORRUGATED PARYLENE DIAPHRAGM; MANUFACTURABILITY; PRESSURE SENSING; TUBE BONDING;

DIAPHRAGMS; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; OPTICAL FIBERS; PHOTORESISTS; SENSORS; SILICON;

PRESSURE TRANSDUCERS;

EID: 33746297338     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/8/005     Document Type: Article

References (13)

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