Kinematically-stabilized microbubble actuator arrays

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 411-414

  Yuan, Guang ^a   Wu, Xiaosong ^a   Yoon, Yong Kyu ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Digital clay; Endoskeletal membrane; Inclined exposure; Micro bubble actuator

Indexed keywords

BUBBLES (IN FLUIDS); DEFORMATION; PNEUMATIC EQUIPMENT; STABILIZATION;

BALLOON-TYPE ACTUATORS; MASS-MANUFACTURABLE ENDOSKELETAL MICRO BUBBLE ACTUATORS; MICROBUBBLE ACTUATOR ARRAYS; OMNI-DIRECTIONAL INFLATION;

MICROACTUATORS;

EID: 26844483919     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. J. Rossignac, M. Allen, W.J. Book, and A. Glezer, "Finger sculpting with Digital Clay: 3D shape input and output through a computer-controlled real surface," Proceedings of International Shape Modeling Conference, 2003, May 12-15, 2003, pp. 229-231.
2. F. Kawai, P. Cusin, and S. Konish, "Thin flexible end-effector using pneumatic balloon actuator," Proceedings of IEEE Micro Electro Mechanical Systems, 2000, pp. 391-396.
3. C. Grosjean, G.B. Lee, W. Hong, Y.C. Tai, and C.M. Ho, "Micro Balloon Actuators for Aerodynamic Control", Proceedings of IEEE Micro Electro Mechanical Systems, 1998, pp. 166-171.
4. M. Yoda and S. Konishi, "Acoustic impedance control through structural tuning by pneumatic balloon actuator", Proceedings of IEEE Micro Electro Mechanical Systems, 2001, pp. 244-247.
5. Y.-K. Yoon, J.-H. Park, F. Cros, and M.G. Allen, "Integrated vertical screen microfilter system using inclined SU-8 structures," Proceedings of IEEE Micro Electro Mechanical Systems, 2003, pp. 227-230.
6. M. Han, W. Lee, S.-K. Lee, and S.S. Lee, "Fabrication of 3D microstructures with inclined/rotated UV lithography," Proceedings of IEEE Micro Electro Mechanical Systems, 2003, pp. 554-557.
7. K.-Y. Hung, H.-T. Hu, and F.-G. Tseng, "Application of 3D glycerol-compensated inclined-exposure technology to an integrated optical pick-up head," J. Micromech. Microeng, vol. 14 (2004) 975-983.
8. X. Yang; Y.-C. Tai; and C.-M. Ho; "Micro Bellow Actuators", International Conference on TRANSDUCERS'97, vol. 1, pp.45-48.