Measurement of light intensity field with a fluorescent bead cantilever

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 822-825

  Kan, Tetsuo ^a   Hoshino, Kazunori ^a   Matsumoto, Kiyoshi ^a   Shimoyama, Isao ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORESCENCE; MEASUREMENT THEORY; PIEZOELECTRIC DEVICES; POSITION CONTROL; SUBSTRATES;

CANTILEVER CONTACT; LIGHT INTENSITY; PIEZORESISTIVE CANTILEVER; SCANNING POSITION DETERMINATION;

CANTILEVER BEAMS;

EID: 33750127582     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. T. Kan et al., Proc. Transducers 2005, pp. 1306-1309.
2. T. Yatsui et al., Appl Phys. Lett., Vol. 73, pp. 2090-2092, 1998.
3. G. A. Massey, Appl. Opt., Vol. 23, pp. 658-661. 1983.
4. M. Gel et al., J. Micromech. Microeng., Vol. 14, pp. 423-428, 2004.