Fabrication of a transmission line on a thick silicon dioxide air-bridge using a complex oxidation process and MEMS technology

Journal of the Korean Physical Society

Volumn 41, Issue 1, 2002, Pages 160-163

  Park, J Y ^a   Lee, J H ^a   Sim, J H ^b   Cho, C S ^a   Bae, Y H ^c  

^a Kyungpook National University   (South Korea)

^b Korea Maritime University   (South Korea)

^c Uiduk University   (South Korea)

Author keywords

Rf mens

Indexed keywords

EID: 0036021586     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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