Membrane-Supported Coplanar Waveguides for MMIC and Sensor Application

IEEE Microwave and Guided Wave Letters

Volumn 8, Issue 5, 1998, Pages 185-187

  Dehe A ^a   Klingbeil, H ^a   Weil, C ^a   Hartnagel, H L ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Coplanar waveguide; Field simulation; Gallium arsenide; Membrane; Micromachining; MMIC

Indexed keywords

COMPUTER SIMULATION; ELECTRIC IMPEDANCE; ELECTROMAGNETIC WAVE ATTENUATION; FINITE DIFFERENCE METHOD; FREQUENCY DOMAIN ANALYSIS; MICROMACHINING; MILLIMETER WAVES; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; PERMITTIVITY; POLYMERIC MEMBRANES; SEMICONDUCTING GALLIUM ARSENIDE; SENSORS;

POLYIMIDE MEMBRANES;

WAVEGUIDES;

EID: 0032069149     PISSN: 10518207     EISSN: None     Source Type: Journal    
DOI: 10.1109/75.668704     Document Type: Article

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