Si-micromachined coplanar waveguides for use in high-frequency circuits

IEEE Transactions on Microwave Theory and Techniques

Volumn 46, Issue 6, 1998, Pages 762-768

  Herrick, Katherine Juliet ^a   Schwarz, Thomas A ^a   Katehi, Linda P B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; MICROMACHINING; MICROWAVES; MILLIMETER WAVES; SEMICONDUCTING SILICON;

COPLANAR WAVEGUIDES;

WAVEGUIDES;

EID: 0032099032     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.681198     Document Type: Article

References (32)

1. N. I. Dib, W. P. Harokopus, L. P. B. Katehi, C. C. Ling, and G. M. Rebeiz, "A study of a novel planar transmission line," presented at the IEEE MTT-S Int. Symp., Boston, MA, June 1991.
2. D. F. Williams and S. E. Schwarz, "Reduction of propagation losses in coplanar waveguide," in IEEE MTT-S Symp. Dig., San Francisco, CA, May 30-June 1, 1984, pp. 453-454.
3. T. M. Weller, G. M. Rebeiz, and L. P. B. Katehi, "Experimental results on microshield transmission line circuits," presented at the IEEE Int. MTT-S Symp., Atlanta, GA, June 1993.
4. T. M. Weller, L. P. B. Katehi, G. M. Rebeiz, H. J. Cheng, and J. F. Whitaker, "Fabrication and characterization of microshield circuits," presented at the Int. Symp. Space Terahertz Technol., Los Angeles, CA, Mar. 1993.
5. R. F. Drayton and L. P. B. Katehi, "Experimental study of micromachined circuits," in Space Terahertz Technol. Int. Symp. Dig., Los Angeles, CA, Mar. 1993, pp. 238-248.
6. "Microwave characterization of microshield lines," presented at the 40th ARFTG Conf. Dig., Orlando, FL, Dec. 1992.
7. "Micromachined circuits for MM-wave applications," in European Microwave Conf. Dig., Madrid, Spain, Sept. 1993, pp. 587-588.
8. H.-J. Cheng, J. F. Whitaker, T. M. Weller, and L. P. B. Katehi, "Terahertz-bandwidth characteristics of coplanar transmission lines on low permittivity substrates," IEEE Trans. Microwave Theory Tech., vol. 42, pp. 2399-2406, Dec. 1994.
9. S. V. Robertson, L. P. B. Katehi, and G. M. Rebeiz, "Micromachined self-packaged W-band bandpass filters," in IEEE MTT-S Symp. Dig., Orlando, FL, 1995, pp. 1543-1546.
10. T. Weller, L. Katehi, M. Herman, and P. Wamhof, "Membrane technology applied to microstrip: A 33 GHz Wilkinson power divider," in IEEE MTT-S Symp. Dig., vol. 2, San Diego, CA, 1994, pp. 911-914.
11. R. F. Drayton, T. M. Weller, and L. P. Katehi, "Development of miniaturized circuits for high-frequency applications using micromachining techniques," Int. J. Microcircuits Electron. Packaging, vol. 18, no. 3, Third Quarter, 1995.
12. R. F. Drayton and L. P. B. Katehi, "Micromachined circuits for Mmwave applications," in Proc. 23rd European Microwave Conf., Madrid, Spain, Sept. 1993, pp. 587-588.
13. "Micromachined conformai packages for microwave and millimeter-wave applications," presented at the IEEE MTT-S Symp., Orlando, FL, May 1995.
14. L. P. B. Katehi et al., "Si micromachining in high-frequency applications," CRC Handbook on Si Micromachining. Boca Ratan, FL: CRC Press, 1995.
15. C. Goldsmith, T.-H. Lin, B. Powers, W.-R. Wu, and B. Norvell, "Micromechanical membrane switches for microwave applications," presented at the IEEE MTT-S Symp., Orlando, FL, May 1995.
16. M. I. Herman, K. A. Lee, E. A. Kolawa, L. E. Lowry, and A. N. Tulintseff, "Novel techniques for millimeter-wave packages," IEEE Trans. Microwave Theory Tech., vol. 43, pp. 1516-1523, July 1995.
17. N. L. VandenBerg and L. P. B. Katehi, "Broad-band vertical interconnects using slot-coupled shielded microstrip lines," IEEE Trans. Microwave Theory Tech., vol. 40, pp. 81-88, Jan. 1992.
18. L. P. B. Katehi, "Novel transmission lines for the submillimeter-wave region," Proc. IEEE, vol. 80, pp. 1771-1787, Nov. 1992.
19. R. F. Drayton, T. M. Weller, and L. P. Katehi, "Development of miniaturized circuits for high-frequency applications using micromachining techniques," Int. J. Microcircuits Electron. Packaging, vol. 18, no. 3, Third Quarter, 1995.
20. S. V. Robertson, L. P. B. Katehi, and G. M. Rebeiz, "Micromachined self-packaged W-band bandpass filters," in IEEE MTT-S Symp. Dig., Orlando, FL, 1995, pp. 1543-1546.
21. L. P. B. Katehi, "Novel transmission lines for the submillimeter-wave region," Proc. IEEE, vol. 80, pp. 1771-1787, Nov. 1992.
22. K. Herrick, T. Schwartz, and L. P. B. Katehi, "W-band micromachined finite ground coplanar waveguide filters," in IEEE MTT-S Symp. Dig., vol. 1, Denver, CO, June 1997, pp. 269-272.
23. G. Ponchak, M. Matloubian, and L. P. B. Katehi, "Losses in W-band finite ground coplanar waveguides," Microwave Guided Wave Lett., to be published.
24. F. Brauchler, J. Papapolymerou, J. East, and L. P. B. Katehi, "W-band monolithic multipliers," in IEEE MTT-S Symp. Dig., vol. 3, Denver, CO, June 1997, pp. 1225-1228.
25. F. Brauchler, S. Robertson, J. East, and L. Katehi, "W-band finite ground coplanar (FGC) line circuit elements," IEEE Trans. Microwave Theory Tech., to be published.
26. F. Brauchler, J. East, and L. Katehi, "W-band FGC multipliers," IEEE Trans. Microwave Theory Tech., to be published.
27. K.-C. Syao, K. Yang, X. Zhang, L.-H. Lu, L. P. B. Katehi, and P. Bhattacharya, "Investigation of adjacent channel crosstalk in multichannel monolithically integrated 1.55-mm photoreceiver arrays," J. Lightweight Technol, vol. 15, Oct. 1997.
28. S. V. Robertson, M. Matloubian, M. Case, and L. P. B. Katehi, "A Si micromachined conformai package for a A'-band low noise HEMT amplifier," in IEEE MTT-S Symp. Dig., vol. 2, Denver, CO, June 1997, pp. 517-520.
29. R. M. Henderson and L. P. B. Katehi, "Silicon-based micromachined packages for discrete components," in IEEE MTT-S Symp. Dig., vol. 2, Denver, CO, June 1997, pp. 521-524.
30. "Si-based micromachined packages for high-frequency applications," IEEE Trans. Microwave Theory Tech., to be published.
31. Z. R. Hu et al., "Characteristics of trenched coplanar waveguide for SiMMIC applications," presented at the Proc. IEEE MTT-S Symp., Denver, CO, June 1997.
32. L. P. B. Katehi, "Power cube first design meeting," Quart. Rep. RL-956, Radiation Lab., Univ. Michigan, Ann Arbor, Dec. 1996.