Surface and interface chemical composition of thin epitaxial SrTiO 3 and BaTiO 3 films: Photoemission investigation

Journal of Applied Physics

Volumn 96, Issue 3, 2004, Pages 1601-1606

  Amy, F ^a   Wan, A ^a   Kahn, A ^a   Walker, F J ^b   McKee, R A ^b  

^a Princeton University   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALTERNATIVE DIELECTRICS; FILM MORPHOLOGY; SURFACE PREPARATION; ULTRAVIOLET (UV) PHOTOEMISSION SPECTROSCOPY;

ANNEALING; BARIUM TITANATE; CAPACITORS; CRYSTALLINE MATERIALS; DYNAMIC RANDOM ACCESS STORAGE; EPITAXIAL GROWTH; FILM GROWTH; MORPHOLOGY; PHOTOEMISSION; SUBSTRATES; SURFACE PROPERTIES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

STRONTIUM COMPOUNDS;

EID: 4043104956     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1765855     Document Type: Article

References (20)

1. International Technology Roadmap for Semiconductors, URL: http://public.itrs.net
2. G. D. Wilk, R. M. Wallace, and J. M. Anthony, J. Appl. Phys. 89, 5243 (2001).
3. R. A. McKee, F. J. Walker, and M. F. Chisholm, Phys. Rev. Lett. 81, 3014 (1998).
4. K. Eisenbeiser et al., Appl. Phys. Lett. 76, 1324 (2000).
5. K. Eisenbeiser et al., IEEE Electron Device Lett. 23, 300 (2002).
6. O. Nakagawara, M. Kobayashi, Y. Yoshino, and Y. Katayama, J. Appl. Phys. 78, 7226 (1995).
7. S. Migita and S. Sakai, J. Appl. Phys. 89, 5421 (2001).
8. X. Hu et al., Appl. Phys. Lett. 82, 203 (2003).
9. R. A. McKee, F. J. Walker, and M. F. Chisholm, Science 293, 468 (2001).
10. M. Kawasaki, et al., Science 266, 1540 (1994).
11. A. G. Schrott, J. A. Misewich, M. Copel, D. W. Abraham, and Y. Zhang, Appl. Phys. Lett. 79, 1786 (2001).
12. S. A. Chambers, Y. Liang, Z. Yu, R. Droopad, and J. Ramdani, J. Vac. Sci. Technol. A 19, 934 (2001).
13. S. A. Chambers, Y. Liang, Z. Yu, R. Droopad, J. Ramdani, and K. Bisenbeiser, Appl. Phys. Lett. 77, 1662 (2000).
14. F. J. Himpsel, F. R. MeFeely, A. Taleb-Ibrahimi, J. A. Yarmoff, and G. Hollinger, Phys. Rev. B 38, 6084 (1988).
15. R. Heise and R. Courths, Surf. Sci. 287-288, 658 (1993).
16. M. Copel, P. R. Duncombe, D. A. Neumayer, T. M. Shaw, and R. M. Tromp, Appl. Phys. Lett. 70, 3227 (1997).
17. V. E. Henrich, G. Dresselhaus, and H. J. Zeiger, Phys. Rev. B 17, 4908 (1978).
18. R. A. McKee, F. J. Walker, M. B. Nardelli, W. A. Shelton, and G. M. Stocks, Science 300, 1726 (2003).
19. P. C. McIntyre, J. Appl. Phys. 89, 8074 (2001).
20. R. Heise and R. Courths, Springer Series in Surface Sciences; Vol. 33, (Springer, Heidelberg, 1993), p. 91.