Graded refractive-index Si Ox infrared filters prepared by reactive magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 2, 2008, Pages 265-269

  Song, Qiuming ^a   Huang, Feng ^a   Li, Ming ^a   Xie, Bin ^a   Wang, Haiqian ^a   Jiang, Yousong ^b   Song, Yizhou ^b  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b Shincron Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; MAGNETRON SPUTTERING; REFLECTION; REFRACTIVE INDEX; SILICON COMPOUNDS;

GRADED REFRACTIVE INDEX; INFRARED OPTICAL FILTERS; SPUTTERING POWER; TRANSMITTANCE SPECTRA;

OPTICAL FILTERS;

EID: 40249093191     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2837836     Document Type: Article

References (24)

1. W. E. Johnson and R. L. Crane, Proc. SPIE PSISDG 0277-786X 2046, 88 (1993).
2. E. P. Donovan, D. Van Vechten, A. D. F. Kahn, C. A. Carosella, and G. K. Hubler, Appl. Opt. APOPAI 0003-6935 28, 2940 (1989).
3. H. Yoda, D. Tanaka, O. Hanaizumi, Y. Kogami, and K. Shiraishi, Appl. Opt. APOPAI 0003-6935 10.1364/AO.45.000184 45, 184 (2006).
4. V. Janicki, S. Wilbrandt, O. Stenze, D. Gäbler, N. Kaiser, A. Tikhonravov, M. Trubetskov, and T. Amotchkina, J. Opt. A, Pure Appl. Opt. JOAOF8 1464-4258 7, 9 (2005).
5. W. H. Southwell, Opt. Lett. OPLEDP 0146-9592 8, 584 (1983).
6. J. A. Dobrowolski, D. Poitras, P. Ma, H. Vakil, and M. Acree, Appl. Opt. APOPAI 0003-6935 10.1364/AO.41.003075 41, 3075 (2002).
7. J. A. Dobrowolski and S. H. C. Piotrowski, Appl. Opt. APOPAI 0003-6935 21, 1502 (1982).
8. X. Wang, H. Masumoto, Y. Someno, and T. Hirai, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.121618 72, 3264 (1998).
9. X. Wang, H. Masumoto, Y. Someno, L. Chen, and T. Hirai, J. Vac. Sci. Technol. A JVTAD6 0734-2101 10.1116/1.582278 18, 933 (2000).
10. H. Bartzsch, S. Lange, P. Frach, and K. Goedicke, Science SCIEAS 0036-8075 180-181, 616 (2004).
11. H. Yoda, K. Shiraishi, Y. Hiratani, and O. Hanaizumi, Appl. Opt. APOPAI 0003-6935 10.1364/AO.43.003548 43, 3548 (2004).
12. M. Kitagawa and M. Tateda, Appl. Opt. APOPAI 0003-6935 24, 3359 (1985).
13. F. Richter, H. Kupfer, P. Schlott, T. Gessner, and C. Kaufmann, Thin Solid Films THSFAP 0040-6090 10.1016/S0040-6090(01)00864-1 389, 278 (2001).
14. C. Battaglin, F. Caccavale, A. Menelle, M. Montecchi, E. Nichelatti, F. Nicoletti, and P. Polato, Thin Solid Films THSFAP 0040-6090 351, 176 (1999).
15. S. H. Jeong, J. K. Kim, B. S. Kim, S. H. Shim, and B. T. Lee, Vacuum VACUAV 0042-207X 76, 507 (2004).
16. G. J. Ockenfuss and N. A. O'Brien, Optical Fiber Communication Conference, FA8-1, 2002 OSA Trends in Optics and Photonics Series Vol. 70 (Optical Society of America, Washington, DC, 2002).
17. C. J. Zhong, H. Tanaka, S. Sugawa, and T. Ohmi, J. Non-Cryst. Solids JNCSBJ 0022-3093 351, 2232 (2005).
18. G. Ṕrez, A. M. Bernal-Oliva, E. Márquez, J. M. González-Leal, C. Morant, I. Ǵnova, J. F. Trigo, and J. M. Sanz, Thin Solid Films THSFAP 0040-6090 10.1016/j.tsf.2005.03.054 485, 274 (2005).
19. X. Y. Chen, Y. F. Lu, Y. H. Wu, B. J. Cho, X. J. Xu, J. R. Dong, and W. D. Song, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1829789 97, 014913 (2005).
20. E. Ritter, Opt. Acta OPACAT 0030-3909 9, 197 (1962).
21. F. C. Lai, M. Li, H. Q. Wang, Y. S. Jiang, and Y. Z. Song, Chin. Opt. Lett. COLHBT 1671-7694 3, 490 (2005).
22. F. C. Lai, M. Li, K. Chen, H. Q. Wang, Y. S. Jiang, and Y. Z. Song, Appl. Opt. APOPAI 0003-6935 10.1364/AO.44.006181 44, 6181 (2005).
23. R. Swanepoel, J. Phys. E JPSIAE 0022-3735 10.1088/0022-3735/16/12/023 16, 1214 (1983).
24. W. D. Sproul, D. J. Christie, and D. C. Carter, Thin Solid Films THSFAP 0040-6090 491, 1 (2005).