Design and preparation of a 33-layer optical reflection filter of TiO2-SiO2 system

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 3, 2000, Pages 933-937

  Wang, Xinrong ^a   Masumoto, Hiroshi ^a   Someno, Yoshihiro ^b   Chen, Lidong ^a   Hirai, Toshio ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b ALPS ELECTRIC CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; LIGHT REFLECTION; LIGHT TRANSMISSION; OPTICAL FILMS; OPTICAL MULTILAYERS; PLASMA APPLICATIONS; REFRACTIVE INDEX; SILICA; SPUTTERING; TITANIUM DIOXIDE;

HELICON PLASMA SPUTTERING;

OPTICAL FILTERS;

EID: 0034187094     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582278     Document Type: Article

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