Helicon plasma deposition of a TiO2/SiO2 multilayer optical filter with graded refractive index profiles

Applied Physics Letters

Volumn 72, Issue 25, 1998, Pages 3264-3266

  Wang, Xinrong ^a   Masumoto, Hiroshi ^a   Someno, Yoshihiro ^b   Hirai, Toshio ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b ALPS ELECTRIC CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000519856     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121618     Document Type: Article

References (17)

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