Rugate filters fabricated by a radio frequency magnetron sputtering system by use of an optical in situ monitoring technique

Applied Optics

Volumn 45, Issue 1, 2006, Pages 184-190

  Yoda, Hidehiko ^a   Tanaka, Daisaku ^a   Hanaizumi, Osamu ^b   Kogami, Yoshinori ^a   Shiraishi, Kazuo ^a  

^a UTSUNOMIYA UNIVERSITY   (Japan)

^b GUNMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MAGNETRON SPUTTERING; REFRACTIVE INDEX; THIN FILMS;

REFRACTIVE INDEX DISTRIBUTION; RUGATE FILTERS; TIME CONTROL;

OPTICAL INSTRUMENTS;

EID: 30844463473     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.000184     Document Type: Article

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