Extensive reliability analysis of tungsten dot NC devices embedded in HfAlO high-k dielectric under NAND (FN/FN) operation

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Volumn , Issue , 2007, Pages 197-202

  Singh, Pawan K ^a   Nainani, Aneesh ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

CIRCUIT SIMULATION; COMPUTATIONAL EFFICIENCY; LOGIC GATES; MATHEMATICAL MODELS; RELIABILITY ANALYSIS; TUNGSTEN;

CAPACITIVE CHARGING MODELS; HIGH-K PROCESSING;

DIELECTRIC MATERIALS;

EID: 39749179836     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IPFA.2007.4378084     Document Type: Conference Paper

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