Room-temperature growth of AlN/TiN epitaxial multi-layer by laser molecular beam epitaxy

Thin Solid Films

Volumn 516, Issue 10, 2008, Pages 2889-2893

  Hara, Wakana ^a   Liu, Jin ^a   Sasaki, Atsushi ^a   Otaka, Sei ^a   Tateda, Norihiro ^a   Saito, Keisuke ^b   Yoshimoto, Mamoru ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b BRUKER AXS INC   (United States)

Author keywords

AlN; Pulsed laser deposition; Room temperature epitaxial growth; TiN; Ultrasmooth surface

Indexed keywords

EPITAXIAL FILMS; PULSED LASER DEPOSITION;

ROOM TEMPERATURE EPITAXIAL GROWTH; ULTRASMOOTH SURFACE;

ALUMINUM COMPOUNDS;

EID: 39649115633     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.05.070     Document Type: Article

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