Production of silicon diaphragms by precision grinding

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4174, Issue , 2000, Pages 244-255

  Prochaska, A ^a   Baine, P T ^a   Mitchell, S J N ^a   Gamble, H S ^a  

^a QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; FINITE ELEMENT METHOD; POROUS SILICON; PRECISION ENGINEERING; SILICON ON INSULATOR TECHNOLOGY;

SILICON DIAPHRAGMS;

MICROMACHINING;

EID: 0034546872     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.396440     Document Type: Conference Paper

References (9)