Polycrystalline silicon thin films with hydrofluoric acid permeability for underlying oxide etching and vacuum encapsulation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 4 II, 2000, Pages 1853-1858

  Kageyama, Y ^a   Tsuchiya, T ^a   Funabashi, H ^a   Sakata, J ^a  

^a Rd Management Section   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; ELECTRON MICROSCOPY; ENCAPSULATION; ETCHING; HYDROFLUORIC ACID; MECHANICAL PERMEABILITY; MICROSENSORS; POLYCRYSTALLINE MATERIALS; SILICON WAFERS; THIN FILMS; VACUUM APPLICATIONS;

VACUUM ENCAPSULATION;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0034227422     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582435     Document Type: Article

References (24)

1. R. T. Howe, J. Vac. Sci. Technol. B 6, 1809 (1988).
2. W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Sens. Actuators 20, 25 (1989).
3. A. P. Lee, P. B. Ljung, and A. P. Pisano, Proceedings IEEE Workshop on Microelectromechanic Systems, Travemünde, Germany, February 1992, pp. 177-182.
4. V. P. Jaecklin, C. Linder, N. F. de Rooij, J. M. Moret, and R. Vuilleumier, Proceedings IEEE Workshop on Microelectromechanic Systems, Fort Lauderdale, FL, February 1993, pp. 124-127.
5. J. Bernstein, S. Cho, A. T. King, A. Kourepenis, P. Maciel, and M. Weinberg, Proceedings IEEE Workshop on Microelectromechanic Systems, Fort Lauderdale, FL, February 1993, pp. 143-148.
6. R. Legtenberg and H. A. C. Tilmans, Sens. Actuators A 45, 57 (1994).
7. K. S. Lebouitz, A. Mazaheri, R. T. Howe, and A. P. Pisano, Proceedings IEEE Workshop on Microelectromechanic Systems, Orlando, FL, January 1999, pp. 470-475.
8. T. Tsuchiya, Y. Kageyama, H. Funabashi, and J. Sakata, Proceedings of the International Conference on Solid-States Sensors and Actuators (Transducers '99), Sendai, Japan, June 1999, pp. 976-979.
9. Y. Cho, B. M. Kwak, A. P. Pisano, and R. T. Howe, Proceedings IEEE Workshop on Microelectromechanic Systems, Fort Lauderdale, FL. February 1993, pp. 93-98.
10. K. S. Lebouitz, R. T. Howe, and A. P. Pisano, Proceedings of the 8th International Conference on Solid-States Sensors and Actuators (Transducers '95), Stockholm, Sweden, June 1995, pp. 224-227.
11. Y. Kageyama, T. Tsuchiya, H. Funabashi, and J. Sakata, Proceedings of the International Conference on Solid-States Sensors and Actuators (Transducers '99), Sendai, Japan, June 1999, pp. 340-343.
12. H. Guckel, J. J. Sniegowski, T. R. Christenson, and F. Raissi, Sens. Actuators A 21-23, 346 (1990).
13. D. J. Monk, D. S. Soane, and R. T. Howe, Proceedings of the International Conference on Solid-States Sensors and Actuators (Transducers '91), San Francisco, CA, 24-27 June 1995, pp. 224-227.
14. D. J. Monk, D. S. Soane, and R. T. Howe, J. Electrochem. Soc. 141, 264 (1994).
15. T. A. Lober, and R. T. Howe, Proceedings of IEEE Solid-States Sensors and Actuators Workshop, Hilton Head Island, SC, 1988, pp. 59-62.
16. J. A. Walker, K. J. Gabriel, and M. Mehregany, Proceedings IEEE Workshop on Microelectromechanic Systems, Napa Valley, CA, February 1990, Vol. 20, pp. 56-60.
17. D. J. Monk, P. Krulevitch, R. T. Howe, and G. C. Johnson, Mater. Res. Soc. Symp. Proc. 308, 641 (1993).
18. F. S. Becker, D. Pawlik, H. Schäfer, and G. Staudigl, J. Vac. Sci. Technol. B 4, 732 (1986).
19. P. J. French and R. F. Wolffenbuttel, J. Micromech. Microeng. 3, 135 (1993).
20. P. J. French and R. F. Wolffenbuttel, J. Micromech. Microeng. 5, 125 (1995).
21. J. H. Rose and R. Gronsky, Appl. Phys. Lett. 41, 993 (1982).
22. J. Liu, Y.-C. Tai, J. Lee, K.-C. Pong, Y. Zohar, and C-M. Ho, Proceedings IEEE Workshop on Microelectromechanic Systems, Fort Lauderdale, FL, February 1993, pp. 71-76.
23. The program was developed at the U.S. National Institutes of Health and available from the Internet by anonymous FTP from zippy.nimh.nih.gov or on floppy disk from the National Technical Information Service, Springfield, Virginia, part number PB95-500195GEI.
24. E. K. Demirlioglu, Ph.D. thesis, TR No. G502-10, Stanford University, CA, 1988.