On a computationally efficient approach to boron-interstitial clustering

ESSDERC 2007 - Proceedings of the 37th European Solid-State Device Research Conference

Volumn 2007, Issue , 2007, Pages 342-345

  Schermer, Johann ^a   Pichler, Peter ^a   Zechner, Christoph ^b   Lerch, Wilfried ^c   Paul, Silke ^c  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

^b SYNOPSYS SWITZERLAND LLC   (Switzerland)

^c MATTSON THERMAL PRODUCTS GMBH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BORON; COMPUTER AIDED DESIGN; ION IMPLANTATION; TRANSIENT ANALYSIS;

BORON INTERSTITIAL CLUSTERING; TCAD SOFTWARE; TRANSIENT ACTIVATION;

SOLID STATE DEVICE STRUCTURES;

EID: 39549088884     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDERC.2007.4430948     Document Type: Conference Paper

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