Microstructure and surface morphology of YSZ thin films deposited by e-beam technique

Applied Surface Science

Volumn 254, Issue 10, 2008, Pages 2980-2987

  Laukaitis, G ^a   Dudonis, J ^a   Milcius D ^b  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b LITHUANIAN ENERGY INSTITUTE   (Lithuania)

Author keywords

Electron beam deposition; Electron gun power; Microstructure; Surface morphology and surface roughness; Thin film growth; YSZ thin films

Indexed keywords

MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SURFACE MORPHOLOGY; X RAY DIFFRACTION; YTTRIUM ALLOYS; ZIRCONIA;

GROWTH MECHANISM; SUBSTRATE TEMPERATURE; YTTRIUM STABILIZED ZIRCONIA (YSZ) THIN FILMS;

THIN FILMS;

EID: 39449121710     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.10.041     Document Type: Article

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