Improvement of the electrical properties of heteroepitaxial yttria-stabilized zirconia (YSZ) films on Si prepared by reactive sputtering

Vacuum

Volumn 59, Issue 2-3, 2000, Pages 390-396

  Horita, S ^a   Nakajima, H ^a   Kuniya, T ^a  

^a JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0347317469     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(00)00292-X     Document Type: Article

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