Low temperature poly-Si thin film transistor on plastic substrates

IEICE Transactions on Electronics

Volumn E88-C, Issue 4, 2005, Pages 667-671

  Kwon, Jang Yeon ^a,b   Kim, Do Young ^a   Cho, Hans S ^a   Park, Kyung Bae ^a   Jung, Ji Sim ^a   Kim, Jong Man ^a   Park, Young Soo ^a,c   Noguchi, Takashi ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b Flexible Poly Si TFT Project   (South Korea)

^c FRAM Project

Author keywords

Plastic substrate; Poly Si; TFT

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; EXCIMER LASERS; INDUCTIVELY COUPLED PLASMA; PLASTICS; POLYSILICON;

ACTIVE CHANNEL; FIELD-EFFECT MOBILITY; PLASTIC SUBSTRATES; TFT;

THIN FILM TRANSISTORS;

EID: 33644503601     PISSN: 09168524     EISSN: 17451353     Source Type: Journal    
DOI: 10.1093/ietele/e88-c.4.667     Document Type: Article

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